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	ece444 Theory and Fabrication of Integrated Circuits

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Lab photo

The Graphs and Tables are used to calculate process variables.

A preview image is provided for each graph - click on the image for a larger .pdf version.

Irvin Curves

Curves used to calculate average conductivity for diffused layers.

Equations

Common equations used for calculating various IC processing parameters.

Animations

Animations are used to present processes graphically.

Graphs and Tables

GT2 · 4PP Correction a

GT3 · 4PP Correction k

GT4 · Dry Oxidation

GT5 · Wet Oxidation

GT6 · Steam Oxidation

GT7 · Oxide Color Chart

GT8 · SiO₂ Equations

GT9 · Trumbore Curves

GT10 · Si Diffusivity Data

GT11 · Goldsmith Curves

GT13 · erfc Table

GT14 · erf Properties

GT15 · Ion Implant Ranges

GT16 · BV for Diffused Junctions

GT19 · Physical Constants

GT20 · Vapor Pressure Curves

GT21 · Herman Mask Set

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Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

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