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GT10 · Silicon Diffusivity Data

Boron and Phosphorus Diffusivity/Solid Solubility

B, P B1 P1
T, °C  D (cm2/s) Nsl (cm-3) Nsl (cm-3) |
900 1.5 x 10-15 3.7 x 1020 6.0 x 1020
950 6.6 x 10-15 3.9 x 1020 7.8 x 1020
1000 2.6 x 10-14 4.1 x 1020 1.0 x 1021
1050 9.3 x 10-14 4.3 x 1020 1.2 x 1021
1100 3.0 x 10-13 4.5 x 1020 1.4 x 1021
1150 9.1 x 10-13 4.8 x 1020 1.5 x 1021
1200 2.5 x 10-12 5.0 x 1020 1.5 x 1021
1250 6.5 x 10-12 5.2 x 1020 1.4 x 1021
1300 1.6 x 10-11 5.4 x 1020 1.1 x 1021
1350 3.7 x 10-11 5.7 x 1020 7.1 x 1020

1F.A. Trumbore, "Solid Solubilities of Impurity Elements in Germanium and Silicon," Bell Syst. Tech. J., 19, 911), 38-43, Nov. 1976.

Diffusivity Data for Dopants in Silicon

Dopant P* As** Sb** B* Al** Ga** In*
Do (cm2/s) 10.5 0.058 3.94 10.5 1.77 0.573 16.5
Ea/k (K) 4.28 x 104 3.83 x 104 4.49 x 104 4.28 x 104 3.78 x 104 3.77 x 104 4.52 x 104

*Reference: Ghandhi p.71
**Highly dependent on doping level. These are PLATO values.

Diffusivity Data for Boron in SiO2

  Do (cm2/s) Ea (eV)
T<1100°C 2.8 x 10-4 3.06
T>1100°C 5.8 x 10-11 1.25

Reference: Burger and Donovan Vol.1 p.159

Diffusivity Data for Phosphorus in SiO2

(open tube, P2O5 source) - Highly Variable

Do (cm2/s) Ea (eV)
1.59 x 10-11 1.1

Reference: Burger and Donovan Vol 1 p.159

Graphs and Tables

GT1 · N vs ρ

GT2 · 4PP Correction a

GT3 · 4PP Correction k

GT4 · Dry Oxidation

GT5 · Wet Oxidation

GT6 · Steam Oxidation

GT7 · Oxide Color Chart

GT8 · SiO2 Equations

GT9 · Trumbore Curves

GT10 · Si Diffusivity Data

GT11 · Goldsmith Curves

GT13 · erfc Table

GT14 · erf Properties

GT15 · Ion Implant Ranges

GT16 · BV for Diffused Junctions

GT19 · Physical Constants

GT20 · Vapor Pressure Curves

GT21 · Herman Mask Set

 

References

Data sheets



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