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LDS Thermal Evaporator
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The LDS 18-7211 Thermal Evaporator System was designed and built in the Spring 2003
semester to supplement the Cooke 301, which can only do a limited number of
wafers with unpredictable metal thickness results. The 7211 was custom-built
specifically for the ECE444 laboratory by Leon Schneider and Dane Sievers .
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Cooke
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LDS
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Bell Jar Diameter
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12"
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18"
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Bell Jar Material
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glass
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stainless steel
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Number of filaments
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2
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2
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Filament type
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W (tungsten) coil
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W (tungsten) boat
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Filament PS
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variac
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Concordia
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Number of wafers/run
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8 x 2"/2 x 4"
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9 x 4"
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Hi Vac Valve
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2" butterfly
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160mm gate
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Roughing pump
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Sargent-Welch Duo-Seal 1402
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Alcatel 2033
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Roughing pump speed
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5.6 cfm
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53.7 cfm
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Hi vac pump
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2" diffusion pump
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Leybold TMP1000C
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Hi vac pump speed
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325 l/s
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~900 l/s
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Low vac gage
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2 TCs
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2 Convectron
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Hi vac gage
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cold cathode
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inverted magnetron cold cathode
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Ultimate pressure
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1 x 10-5 Torr
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5 x 10-8 Torr
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Process Equipment
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Answers provided by this service may not be relevant to the materials presented in this website.
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