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Veeco FP-100 Four Point Probe

Description Operation

The Veeco four point probe is used for measuring resistivity and calculating sheet resistance of samples. See Theory of operation.

The Veeco can penetrate thin insulating surface layers by applying a short 170v pulse to the probe tips when the penetrate function is selected. Then, after making the resistivity measurement, the unit can determine the type of the semiconductor. For low resistivity samples the type is determined by applying an ac signal between two probes and monitoring the dc bias of the wafer with a third probe. Lightly doped semiconductors will form rectifying contacts with the probe tips causing the wafer bias to go up (positive) for N type material and negative for P type material. Highly doped semiconductors will not develop a conclusive wafer bias, but the applied ac signal can heat such material sufficiently for observation of the thermoelectric effect (as in the hot-point probe). If neither method is conclusive, both N and P indicators will flash.

NOTE: The electronics do not always know when the tests for conductivity type are inconclusive. If it disagrees with the hot point probe, disregard it.

Process Equipment

· Gaertner Ellipsometer

· Evaporator (CVE)

· Evaporator (LDS)

· Filmetrics FT-20

· Prometrix FT650

· Four Point Probe (LDS)

· Four Point Probe (Veeco)

· Furnace

· Plasma Asher

· Spin-Rinse-Dryer

· Stepper (Nikon)

· Stepper (Ultratech)

· Probe Stations


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