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Prometrix FT-650 Film Thickness Measurement
The Prometrix FT-650 Film Thickness
Probe uses the CARIS technique (Constant Angle Reflection Spectroscopy)
to accurately and quickly measure thin films. This technique uses a white light
source to illuminate the sample and measures the reflected light intensity over
the range of 400nm - 800nm. The incident light and reflected light combine with
resulting constructive/ destructive interference, producing maxima/minima values
in the spectrum. The intensity versus wavelength values are then used to calculate
film thickness.
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Process Equipment
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