The Ultratech 1000 Wide Field stepper is the current lithography tool used in the ECE444 lab. There actually was a reluctance to install these machines due to their cost and the removal of operator involvement with aligning. However, the Ultratech has proven to be a reliable tool ideally suited for teaching.

The 1000WFs are still in use by small start-up semiconductor fabs and were in use by Intel until December of 1996. There are enough left to support third party parts suppliers and reconditioners and have the ability to mix-and-match with other steppers.

The steppers present in the lab have been modified by Intel, and their performance have been enhanced from stock machines. Positioning resolution has been increased (closer alignment), and the optics have been enhanced (possible to achieve sub-micron resolution).