ece444 Mask Set
The ece444 mask set contains approximately 19,000 structures on a 100mm Si wafer.
Approximately 10,000 are electronic devices and ~9,000 are test patterns.
Examples of the devices fabricated:
- MOS Capacitors
- pn Diodes
The current mask set is based on the work of Kevin Tsurutome (1991), Ron Stack (1994), and
Dane Sievers (1998).
LASI was used for the
layout of the mask and printed using the e-beam lithography system
located in the Micro and Nanotechnology Lab.
The current ece444 mask set (for use on 100mm Ultratech steppers) and older 1994 mask set
(for 2" contact aligner) CAD files are available as zipped tlc or GDSII files.
LASI TLC Format
CleWin gds file reader
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