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Theory and Fabrication of Integrated Circuits
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Power Failure

In the Event of a Power Failure, Turn Off:

  • all computers
  • steppers - the stage may potentially lose track of position and run away
  • furnaces
    • turn off breakers for the individual furnaces
    • open the side doors for ventilation
  • fume hoods - leave the sashes open! Evacuate the wet lab.
  • air handlers - no action, they will be taken care of by F&S

If the power is still out after 15 minutes, students will be dismissed.

Restoration of Power Means Everything Can Be Turned Back On:

but note the following:

  • check the hydrogen detection system to ensure there are no faults
  • e-mail the lab director with a short report of what happened

Lab Safety

·MSDSs

·Evacuation Routes

·Fire Alarms

·Hydrogen Alarms

·Injuries

·Personal Protective Equipment

·Power Outage

·Safety Handout









In case of emergency, always call 9-911 and give the following information:

·Your name

·Location:
ECE444 Fabrication Laboratory
Room 260
2nd Floor MNTL
208 N. Wright St.

·Specific information about the emergency


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Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

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