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Theory and Fabrication of Integrated Circuits
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ICS Test Setups

To view parameters for tests after loading them onto the main window, click on the Edit Test Setup button at the top of the window.

Edit Test Setup

The Setup Editor window will appear with a schematic of the device being tested and the leads from the measuring instrument connected.

ICS setup

In the upper right-hand corner is a drop-down list of the test setups (in this example, IC_V_VCE). You can change the test setup by selecting a new test from the drop-down list.

In the middle is a circuit diagram of the device being tested (an npn BJT) with each of the leads labeled (E, B, C) and the test leads from the instrument connected to each lead of the device (SMU1 to E, SMU2 to B, SMU3 to C).

To view and modify the test conditions, double click the instrument lead box connected to the device. For this example, double click SMU3. The SMU Setup window will open with the current test conditions for the lead displayed.

ICS setup

In this example, SMU3 was selected. The options available for the lead are dependent upon the test instrument connected. This lead, connected to an Agilent 4155C, will be used as:

  • voltage source
  • measure and return Vc, Ic values
  • single linear sweep
  • 0 – 10 volts
  • 100mV resolution
  • 100mA compliance

The test instruments dictate the options available – your TA can explain the available configurations. To close the window, click Cancel (don’t change what has been setup already).

Perform the following tests in order:

  1. MOS Capacitor

  2. PMOSFET

  3. pn Diode

  4. BJT

ICS Reference

  · Introduction

  · Starting

  · File Structure

  · Test Setup

  · Measurements

  · Transforms

  · Plots

IC-CAP Files

  · Tutorial Model

  · Hardware Setup

  · Sample Tutorial Dataset

Data Sheets

  · MTP2955

  · 2N2222A

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