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GT10 · Silicon Diffusivity Data
Boron and Phosphorus Diffusivity/Solid Solubility
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|
B, P |
B1 |
P1 |
|
T, °C |
D (cm2/s) |
Nsl (cm-3) |
Nsl (cm-3) | |
|
900 |
1.5 x 10-15 |
3.7 x 1020 |
6.0 x 1020 |
|
950 |
6.6 x 10-15 |
3.9 x 1020 |
7.8 x 1020 |
|
1000 |
2.6 x 10-14 |
4.1 x 1020 |
1.0 x 1021 |
|
1050 |
9.3 x 10-14 |
4.3 x 1020 |
1.2 x 1021 |
|
1100 |
3.0 x 10-13 |
4.5 x 1020 |
1.4 x 1021 |
|
1150 |
9.1 x 10-13 |
4.8 x 1020 |
1.5 x 1021 |
|
1200 |
2.5 x 10-12 |
5.0 x 1020 |
1.5 x 1021 |
|
1250 |
6.5 x 10-12 |
5.2 x 1020 |
1.4 x 1021 |
|
1300 |
1.6 x 10-11 |
5.4 x 1020 |
1.1 x 1021 |
|
1350 |
3.7 x 10-11 |
5.7 x 1020 |
7.1 x 1020 |
1F.A. Trumbore, "Solid Solubilities of Impurity Elements in Germanium and Silicon," Bell Syst. Tech. J., 19, 911), 38-43, Nov. 1976.
Diffusivity Data for Dopants in Silicon
|
Dopant |
P* |
As** |
Sb** |
B* |
Al** |
Ga** |
In* |
|
Do (cm2/s) |
10.5 |
0.058 |
3.94 |
10.5 |
1.77 |
0.573 |
16.5 |
|
Ea/k (K) |
4.28 x 104 |
3.83 x 104 |
4.49 x 104 |
4.28 x 104 |
3.78 x 104 |
3.77 x 104 |
4.52 x 104 |
*Reference: Ghandhi p.71
**Highly dependent on doping level. These are PLATO values.
Diffusivity Data for Boron in SiO2
|
|
Do (cm2/s) |
Ea (eV) |
|
T<1100°C |
2.8 x 10-4 |
3.06 |
|
T>1100°C |
5.8 x 10-11 |
1.25 |
Reference: Burger and Donovan Vol.1 p.159
Diffusivity Data for Phosphorus in SiO2
(open tube, P2O5
source) - Highly Variable
|
Do (cm2/s) |
Ea (eV) |
|
1.59 x 10-11 |
1.1 |
Reference: Burger and Donovan Vol 1 p.159
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Graphs and Tables
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