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GT13 · erfc Table

 x  erfc x  x  erfc x  x  erfc x  x  erfc x  x  erfc x  x  erfc x
0.01 9.89E-01 0.77 2.76E-01 1.53 3.05E-02 2.29 1.20E-03 3.05 1.61E-05 3.81 7.13E-08
0.02 9.77E-01 0.78 2.70E-01 1.54 2.94E-02 2.30 1.14E-03 3.06 1.52E-05 3.82 6.59E-08
0.03 9.66E-01 0.79 2.64E-01 1.55 2.84E-02 2.31 1.09E-03 3.07 1.42E-05 3.83 6.09E-08
0.04 9.55E-01 0.80 2.58E-01 1.56 2.74E-02 2.32 1.03E-03 3.08 1.33E-05 3.84 5.63E-08
0.05 9.44E-01 0.81 2.52E-01 1.57 2.64E-02 2.33 9.84E-04 3.09 1.24E-05 3.85 5.20E-08
0.06 9.32E-01 0.82 2.46E-01 1.58 2.55E-02 2.34 9.36E-04 3.10 1.17E-05 3.86 4.80E-08
0.07 9.21E-01 0.83 2.40E-01 1.59 2.45E-02 2.35 8.89E-04 3.11 1.09E-05 3.87 4.44E-08
0.08 9.10E-01 0.84 2.35E-01 1.60 2.37E-02 2.36 8.45E-04 3.12 1.02E-05 3.88 4.09E-08
0.09 8.99E-01 0.85 2.29E-01 1.61 2.28E-02 2.37 8.03E-04 3.13 9.59E-06 3.89 3.78E-08
0.10 8.88E-01 0.86 2.24E-01 1.62 2.20E-02 2.38 7.63E-04 3.14 8.98E-06 3.90 3.49E-08
0.11 8.76E-01 0.87 2.19E-01 1.63 2.12E-02 2.39 7.25E-04 3.15 8.41E-06 3.91 3.22E-08
0.12 8.56E-01 0.88 2.13E-01 1.64 2.04E-02 2.40 6.89E-04 3.16 7.87E-06 3.92 2.97E-08
0.13 8.54E-01 0.89 2.08E-01 1.65 1.96E-02 2.41 6.54E-04 3.17 7.36E-06 3.93 2.74E-08
0.14 8.43E-01 0.90 2.03E-01 1.66 1.89E-02 2.42 6.21E-04 3.18 6.89E-06 3.94 2.52E-08
0.15 8.32E-01 0.91 1.98E-01 1.67 1.82E-02 2.43 5.89E-04 3.19 6.45E-06 3.95 2.33E-08
0.16 8.21E-01 0.92 1.93E-01 1.68 1.75E-02 2.44 5.59E-04 3.20 6.03E-06 3.96 2.15E-08
0.17 8.10E-01 0.93 1.88E-01 1.69 1.68E-02 2.45 5.31E-04 3.21 5.64E-06 3.97 1.98E-08
0.18 7.99E-01 0.94 1.84E-01 1.70 1.62E-02 2.46 5.03E-04 3.22 5.27E-06 3.98 1.82E-08
0.19 7.88E-01 0.95 1.79E-01 1.71 1.56E-02 2.47 4.78E-04 3.23 4.93E-06 3.99 1.68E-08
0.20 7.77E-01 0.96 1.75E-01 1.72 1.50E-02 2.48 4.53E-04 3.24 4.61E-06 4.00 1.55E-08
0.21 7.66E-01 0.97 1.70E-01 1.73 1.44E-02 2.49 4.29E-04 3.25 4.31E-06 4.01 1.42E-08
0.22 7.56E-01 0.98 1.66E-01 1.74 1.39E-02 2.50 4.07E-04 3.26 4.02E-06 4.02 1.31E-08
0.23 7.45E-01 0.99 1.61E-01 1.75 1.33E-02 2.51 3.86E-04 3.27 3.76E-06 4.03 1.21E-08
0.24 7.34E-01 1.00 1.57E-01 1.76 1.28E-02 2.52 3.66E-04 3.28 3.51E-06 4.04 1.11E-08
0.25 7.24E-01 1.01 1.53E-01 1.77 1.23E-02 2.53 3.46E-04 3.29 3.28E-06 4.05 1.02E-08
0.26 7.13E-01 1.02 1.49E-01 1.78 1.18E-02 2.54 3.28E-04 3.30 3.06E-06 4.06 9.40E-09
0.27 7.03E-01 1.03 1.45E-01 1.79 1.14E-02 2.55 3.11E-04 3.31 2.86E-06 4.07 8.65E-09
0.28 6.92E-01 1.04 1.41E-01 1.80 1.09E-02 2.56 2.94E-04 3.32 2.67E-06 4.08 7.95E-09
0.29 6.82E-01 1.05 1.38E-01 1.81 1.05E-02 2.57 2.79E-04 3.33 2.49E-06 4.09 7.31E-09
0.30 6.71E-01 1.06 1.34E-01 1.82 1.01E-02 2.58 2.64E-04 3.34 2.32E-06 4.10 6.72E-09
0.31 6.61E-01 1.07 1.30E-01 1.83 9.65E-03 2.59 2.50E-04 3.35 2.17E-06 4.11 6.18E-09
0.32 6.51E-01 1.08 1.27E-01 1.84 9.26E-03 2.60 2.36E-04 3.36 2.02E-06 4.12 5.68E-09
0.33 6.41E-01 1.09 1.23E-01 1.85 8.89E-03 2.61 2.23E-04 3.37 1.88E-06 4.13 5.21E-09
0.34 6.31E-01 1.10 1.20E-01 1.86 8.56E-03 2.62 2.11E-04 3.38 1.75E-06 4.14 4.79E-09
0.35 6.21E-01 1.11 1.16E-01 1.87 8.18E-03 2.63 2.00E-04 3.39 1.64E-06 4.15 4.40E-09
0.36 6.11E-01 1.12 1.13E-01 1.88 7.84E-03 2.64 1.89E-04 3.40 1.52E-06 4.16 4.04E-09
0.37 6.01E-01 1.13 1.10E-01 1.89 7.52E-03 2.65 1.79E-04 3.41 1.42E-06 4.17 3.71E-09
0.38 5.91E-01 1.14 1.07E-01 1.90 7.21E-03 2.66 1.69E-04 3.42 1.32E-06 4.18 3.40E-09
0.39 5.81E-01 1.15 1.04E-01 1.91 6.91E-03 2.67 1.59E-04 3.43 1.23E-06 4.19 3.12E-09
0.40 5.72E-01 1.16 1.01E-01 1.92 6.62E-03 2.68 1.51E-04 3.44 1.15E-06 4.20 2.87E-09
0.41 5.62E-01 1.17 9.80E-02 1.93 6.34E-03 2.69 1.42E-04 3.45 1.07E-06 4.21 2.63E-09
0.42 5.53E-01 1.18 9.50E-02 1.94 6.08E-03 2.70 1.34E-04 3.46 9.94E-07 4.22 2.41E-09
0.43 5.43E-01 1.19 9.24E-02 1.95 5.82E-03 2.71 1.27E-04 3.47 9.25E-07 4.23 2.21E-09
0.44 5.34E-01 1.20 8.97E-02 1.96 5.57E-03 2.72 1.20E-04 3.48 8.60E-07 4.24 2.03E-09
0.45 5.25E-01 1.21 8.70E-02 1.97 5.34E-03 2.73 1.13E-04 3.49 8.00E-07 4.25 1.86E-09
0.46 5.15E-01 1.22 8.45E-02 1.98 5.11E-03 2.74 1.07E-04 3.50 7.44E-07 4.26 1.70E-09
0.47 5.06E-01 1.23 8.19E-02 1.99 4.89E-03 2.75 1.01E-04 3.51 6.92E-07 4.27 1.56E-09
0.48 4.97E-01 1.24 7.95E-02 2.00 4.88E-03 2.76 9.50E-05 3.52 6.43E-07 4.28 1.43E-09
0.49 4.88E-01 1.25 7.71E-02 2.01 4.48E-03 2.77 8.96E-05 3.53 5.98E-07 4.29 1.31E-09
0.50 4.79E-01 1.26 7.48E-02 2.02 4.28E-03 2.78 8.44E-05 3.54 5.56E-07 4.30 1.20E-09
0.51 4.71E-01 1.27 7.25E-02 2.03 4.09E-03 2.79 7.96E-05 3.55 5.16E-07 4.31 1.10E-09
0.52 4.62E-01 1.28 7.03E-02 2.04 3.91E-03 2.80 7.50E-05 3.56 4.80E-07 4.32 1.00E-09
0.53 4.54E-01 1.29 6.81E-02 2.05 3.74E-03 2.81 7.07E-05 3.57 4.45E-07 4.33 9.19E-10
0.54 4.45E-01 1.30 6.60E-02 2.06 3.58E-03 2.82 6.66E-05 3.58 4.14E-07 4.34 8.41E-10
0.55 4.37E-01 1.31 6.39E-02 2.07 3.42E-03 2.83 6.28E-05 3.59 3.84E-07 4.35 7.69E-10
0.56 4.28E-01 1.32 6.19E-02 2.08 3.27E-03 2.84 5.91E-05 3.60 3.56E-07 4.36 7.03E-10
0.57 4.20E-01 1.33 6.00E-02 2.09 3.12E-03 2.85 5.57E-05 3.61 3.31E-07 4.37 6.43E-10
0.58 4.12E-01 1.34 5.81E-02 2.10 2.98E-03 2.86 5.24E-05 3.62 3.07E-07 4.38 5.88E-10
0.59 4.04E-01 1.35 5.62E-02 2.11 2.85E-03 2.87 4.94E-05 3.63 2.85E-07 4.39 5.37E-10
0.60 3.96E-01 1.36 5.44E-02 2.12 2.72E-03 2.88 4.64E-05 3.64 2.64E-07 4.40 4.91E-10
0.61 3.88E-01 1.37 5.27E-02 2.13 2.59E-03 2.89 4.37E-05 3.65 2.45E-07 4.41 4.49E-10
0.62 3.81E-01 1.38 5.10E-02 2.14 2.47E-03 2.90 4.11E-05 3.66 2.27E-07 4.42 4.10E-10
0.63 3.73E-01 1.39 4.92E-02 2.15 2.36E-03 2.91 3.87E-05 3.67 2.11E-07 4.43 3.74E-10
0.64 3.65E-01 1.40 4.77E-02 2.16 2.25E-03 2.92 3.64E-05 3.68 1.95E-07 4.44 3.43E-10
0.65 3.58E-01 1.41 4.61E-02 2.17 2.15E-03 2.93 3.42E-05 3.69 1.81E-07 4.45 3.12E-10
0.66 3.51E-01 1.42 4.46E-02 2.18 2.05E-03 2.94 3.22E-05 3.70 1.67E-07 4.46 2.85E-10
0.67 3.43E-01 1.43 4.31E-02 2.19 1.95E-03 2.95 3.02E-05 3.71 1.55E-07 4.47 2.60E-10
0.68 3.36E-01 1.44 4.17E-02 2.20 1.86E-03 2.96 2.84E-05 3.72 1.44E-07 4.48 2.37E-10
0.69 3.29E-01 1.45 4.03E-02 2.21 1.78E-03 2.97 2.67E-05 3.73 1.22E-07 4.49 2.17E-10
0.70 3.22E-01 1.46 3.89E-02 2.22 1.69E-03 2.98 2.51E-05 3.74 1.23E-07 4.50 1.98E-10
0.71 3.15E-01 1.47 3.76E-02 2.23 1.61E-03 2.99 2.35E-05 3.75 1.14E-07
0.72 3.02E-01 1.48 3.63E-02 2.24 1.54E-03 3.00 2.21E-05 3.76 1.05E-07
0.73 3.01E-01 1.49 3.51E-02 2.25 1.46E-03 3.01 2.08E-05 3.77 9.76E-08
0.74 2.95E-01 1.50 3.39E-02 2.26 1.39E-03 3.02 1.95E-05 3.78 9.03E-08
0.75 2.89E-01 1.51 3.27E-02 2.27 1.33E-03 3.03 1.83E-05 3.79 8.35E-08
0.76 2.82E-01 1.52 3.16E-02 2.28 1.26E-03 3.04 1.72E-05 3.80 7.72E-08

Graphs and Tables

GT1 · N vs ρ

GT2 · 4PP Correction a

GT3 · 4PP Correction k

GT4 · Dry Oxidation

GT5 · Wet Oxidation

GT6 · Steam Oxidation

GT7 · Oxide Color Chart

GT8 · SiO2 Equations

GT9 · Trumbore Curves

GT10 · Si Diffusivity Data

GT11 · Goldsmith Curves

GT13 · erfc Table

GT14 · erf Properties

GT15 · Ion Implant Ranges

GT16 · BV for Diffused Junctions

GT19 · Physical Constants

GT20 · Vapor Pressure Curves

GT21 · Herman Mask Set

 

References

Data sheets


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