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GT15 · Ion Implantation Effective Range Data
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P in Si |
P in SiO2 |
B in Si |
B in SiO2 |
|
Energy (kEv) |
Rp |
ΔRp |
Rp |
ΔRp |
Rp |
ΔRp |
Rp |
ΔRp |
|
10 |
0.0139
|
0.0069
|
0.0108
|
0.0048
|
0.0333
|
0.0171
|
0.0298
|
0.0143
|
|
20 |
0.0253 |
0.0119 |
0.0199 |
0.0084 |
0.0662 |
0.0283 |
0.0622 |
0.0252 |
|
30 |
0.0368 |
0.0166 |
0.0292 |
0.0119 |
0.0987 |
0.0371 |
0.0954 |
0.0342 |
|
40 |
0.0486 |
0.0212 |
0.0388 |
0.0152 |
0.1302 |
0.0443 |
0.1283 |
0.0418 |
|
50 |
0.0607 |
0.0256 |
0.0486 |
0.0185 |
0.1608 |
0.0504 |
0.1606 |
0.0483 |
|
60 |
0.0730 |
0.0298 |
0.0586 |
0.0216 |
0.1903 |
0.0556 |
0.1921 |
0.0540 |
|
70 |
0.0855 |
0.0340 |
0.0688 |
0.0247 |
0.2188 |
0.0601 |
0.2228 |
0.0590 |
|
80 |
0.0981 |
0.0380 |
0.0792 |
0.0276 |
0.2465 |
0.0641 |
0.2528 |
0.0634 |
|
90 |
0.1109 |
0.0418 |
0.0896 |
0.0305 |
0.2733 |
0.0677 |
0.2819 |
0.0674 |
|
100 |
0.1238 |
0.0456 |
0.1002 |
0.0333 |
0.2994 |
0.0710 |
0.3104 |
0.0710 |
|
110 |
0.1367 |
0.0492 |
0.1108 |
0.0360 |
0.3248 |
0.0739 |
0.3382 |
0.0743 |
|
120 |
0.1497 |
0.0528 |
0.1215 |
0.0387 |
0.3496 |
0.0766 |
0.3653 |
0.0774 |
|
130 |
0.1627 |
0.0562 |
0.132 |
0.0412 |
0.3737 |
0.0790 |
0.3919 |
0.0801 |
|
140 |
0.1727 |
0.0595 |
0.1429 |
0.0437 |
0.3974 |
0.0813 |
0.4179 |
0.0827 |
|
150 |
0.1888 |
0.0628 |
0.1537 |
0.0461 |
0.4205 |
0.0834 |
0.4434 |
0.0851 |
*Rp and ΔRp in μm
*After Gibbons, Johnson, and Mylroie, Projected Range Statistics, 2nd. Ed., Dowden,
Hutchison, and Ross, Inc.
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