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Theory and Fabrication of Integrated Circuits
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The lecture portion of ece444 introduces students to the fundamental theory of integrated circuit fabrication.

Objectives for the course:

Topics discussed:

  1. Processing overview
  2. The silicon wafer
  3. Oxidation
  4. Photolithography
  5. Etching processes
  6. Junction Diffusion
  7. Bipolar transistor design
  8. Diffusion related processes
  9. Chemical vapor deposition
  10. Ion beam processing

Lecture Figures

Other Courses

Supplements

AD1 Exam Dates

Exam 1: TBA
Exam 2: TBA
Exam 3: TBA
Exam 4: TBA
Exam 5: TBA
Exam 6: TBA

updated: 8/24/2012

AD2 Exam Dates

Exam 1: TBA
Exam 2: TBA
Exam 3: TBA
Exam 4: TBA
Exam 5: TBA
Exam 6: TBA

updated: 8/24/2012


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Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

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