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GT15 · Ion Implantation Effective Range Data

P in Si P in SiO2 B in Si B in SiO2
Energy (kEv) Rp ΔRp Rp ΔRp Rp ΔRp Rp ΔRp
10 0.0139  0.0069  0.0108  0.0048  0.0333  0.0171  0.0298  0.0143 
20 0.0253 0.0119 0.0199 0.0084 0.0662 0.0283 0.0622 0.0252
30 0.0368 0.0166 0.0292 0.0119 0.0987 0.0371 0.0954 0.0342
40 0.0486 0.0212 0.0388 0.0152 0.1302 0.0443 0.1283 0.0418
50 0.0607 0.0256 0.0486 0.0185 0.1608 0.0504 0.1606 0.0483
60 0.0730 0.0298 0.0586 0.0216 0.1903 0.0556 0.1921 0.0540
70 0.0855 0.0340 0.0688 0.0247 0.2188 0.0601 0.2228 0.0590
80 0.0981 0.0380 0.0792 0.0276 0.2465 0.0641 0.2528 0.0634
90 0.1109 0.0418 0.0896 0.0305 0.2733 0.0677 0.2819 0.0674
100 0.1238 0.0456 0.1002 0.0333 0.2994 0.0710 0.3104 0.0710
110 0.1367 0.0492 0.1108 0.0360 0.3248 0.0739 0.3382 0.0743
120 0.1497 0.0528 0.1215 0.0387 0.3496 0.0766 0.3653 0.0774
130 0.1627 0.0562 0.132 0.0412 0.3737 0.0790 0.3919 0.0801
140 0.1727 0.0595 0.1429 0.0437 0.3974 0.0813 0.4179 0.0827
150 0.1888 0.0628 0.1537 0.0461 0.4205 0.0834 0.4434 0.0851

*Rp and ΔRp in μm

*After Gibbons, Johnson, and Mylroie, Projected Range Statistics, 2nd. Ed., Dowden, Hutchison, and Ross, Inc.

Graphs and Tables

GT1 · N vs ρ

GT2 · 4PP Correction a

GT3 · 4PP Correction k

GT4 · Dry Oxidation

GT5 · Wet Oxidation

GT6 · Steam Oxidation

GT7 · Oxide Color Chart

GT8 · SiO2 Equations

GT9 · Trumbore Curves

GT10 · Si Diffusivity Data

GT11 · Goldsmith Curves

GT13 · erfc Table

GT14 · erf Properties

GT15 · Ion Implant Ranges

GT16 · BV for Diffused Junctions

GT19 · Physical Constants

GT20 · Vapor Pressure Curves

GT21 · Herman Mask Set

 

References

Data sheets


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