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Theory and Fabrication of Integrated Circuits
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The ece444 laboratory contains a full array of silicon processing tools.

As a result of years of teaching excellence, the laboratory has acquired a full array of equipment, including:

  • Step and repeat projection aligners
  • High temperature furnaces
  • Evaporators
  • Wet etching hoods
  • an extensive array of metrology tools
  • Electrical test benches




Logsheets

ece444 Maskset

Testing

IC Process

  1. RCA clean

  2. Initial oxidation

  3. Mask 1

  4. Mask 1 etch

  5. Mask 1 PR removal

  6. Boron predep

  7. BSG etch

  8. Boron drive

  9. Mask 2

10. Mask 2 etch

11. Mask 2 PR removal

12. Phosphorus predep

13. PSG Etch

14. Mask 3

15. Mask 3 etch

16. Mask 3 removal

17. Gate oxidation

18. Mask 4

19. Mask 4 etch

20. Mask 4 removal

21. Mask 5

22. Evaporation

23. Lift off

24. Anneal


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Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

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