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Theory and Fabrication of Integrated Circuits
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Industry recognizes that ece444 provides a strong foundation in both theoretical and practical semiconductor processing for tomorrow's engineers.

In recognition and support of ece444, several semiconductor manufacturers have donated real IC production equipment.

Intel is a strong supporter of ECE444.

Intel logo ECE444 was the recipient of an entire production line (furnaces, steppers, evaporator, asher, etcher, spin-rinse-dryer, metrology) from Intel.

The ECE444 lab was the first lab to receive such a comprehensive single donation from Intel in their support of education.

This support has continued with additional donations to keep the lab up to date.

Companies which have donated equipment, services, and supplies to ece444

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Process Equipment

· Gaertner Ellipsometer

· Evaporator (CVE)

· Evaporator (LDS)

· Filmetrics FT-20

· Prometrix FT650

· Four Point Probe (LDS)

· Four Point Probe (Veeco)

· Furnace

· Plasma Asher

· Spin-Rinse-Dryer

· Stepper (Nikon)

· Stepper (Ultratech)

· Probe Stations


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Department of Electrical and Computer Engineering
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University of Illinois Urbana-Champaign

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