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	ece444 Theory and Fabrication of Integrated Circuits


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LDS Four Point Probe

Description

Theory

3D Drawings

The LDS Four Point Probe (4pp) is used for measuring resistivity and calculating sheet resistance of samples. See Theory of operation.

The LDS 4pp is a manual probing system capable of measuring up to 200mm wafers. Electrical measurements are performed by an Agilent 4155C SPA utilizing a Signatone 40mil head. Functions include calibration checking with a VLSI 22.6mΩ/sq standard, random point sampling, wafer mapping, and database storage of measured values.

The LDS Four Point Probe was designed and built by Leon Schneider as an independent study project. Software was developed by Dane Sievers using National Instruments LabView.

Process Equipment

· Gaertner Ellipsometer

· Four Point Probe (LDS)

· Four Point Probe (Veeco)

· Furnace

· Plasma Asher

· Spin-Rinse-Dryer

· Stepper (Nikon)

· Stepper (Ultratech)

· Probe Stations

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Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign